| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost atmospheric pressure discharge device capable of giving a high power density without using a special high frequency power source or a voltage/current controlling apparatus and without requiring addition of helium gas, water vapor or the like in a high frequency plasma discharge method at a pressure around an atmospheric pressure. <P>SOLUTION: An insulator discharge structure 1 is provided with an area 2, in which a discharge part cross sectional area perpendicular to the gas flow direction is continuously reduced, on the gas flow introducing direction side 2 of a plasma discharge generation part 4a and provided with a structure causing a pressure reduction in the vicinity of the discharge part. Via the insulator discharge structure 1, a plurality of electric field faces crossing the gas flow direction 7 orthogonally are formed intermittently along the gas flow direction 7 between a plurality of high frequency electrode 5a and 5b. As to intensity of the formed electric field, a plurality of high density electric fields can be formed across all the gas flow passages because the high frequency electrode is formed into a linear shape. Consequently, addition of an ionizing gas such as helium gas is not required, and no special voltage/current control power source is required in this discharge method at a temperature around the atmospheric pressure. <P>COPYRIGHT: (C)2003,JPO |
