| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet power meter which has a flat sensitivity curve in an ultraviolet range. SOLUTION: An optical power meter outputs the intensity of light having prescribed wavelengths and irradiating a photodetector, and the photodetector is equipped with a semiconductor photodetection region formed of In<SB>x</SB>Al<SB>y</SB>Ga<SB>1-x-y</SB>N (0≤x≤1, 0≤y≤1). COPYRIGHT: (C)2003,JPO
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