PHOTOMASK FOR FORMING PIEZOELECTRIC VIBRATING PIECE, METHOD OF MANUFACTURING THE PIEZOELECTRIC VIBRATING PIECE USING THE SAME, AND PIEZOELECTRIC DEVICE USING THE PIEZOELECTRIC VIBRATING PIECE, PORTABLE TELEPHONE USING THE PIEZOELECTRIC DEVICE AND ELECTRONIC EQUIPMENT USING PIEZOELECTRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a photomask or the like capable of performing process evaluation without the need for a work of accurate dimensional measurement in a halfway step, in a manufacturing process of a tuning fork type piezoelectric vibrating piece.

SOLUTION: The photomask for forming a piezoelectric vibrating piece is provided with patterns LA1, LA2-LAn for forming the external shape of a piezoelectric vibrating piece, which correspond to each shape of a base 51 and a pair of vibrating arms 34, 35 extending from the base 51, and a test pattern 73 which is provided being different from these forming pattern of a piezoelectric resonance piece and is provided with a plurality of width dimensions which monotonically vary successively from a narrow width to a wide width.

COPYRIGHT: (C)2003,JPO