| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for detecting an unbalance of a rotary shaft which is capable of automatically detecting an unbalance of a rotary shaft and then rapidly feeding back the results. SOLUTION: A multi-blade type dicing apparatus 10 has such a structure that a plurality of rotary blades 12 are fixed to one and the same rotary shaft 14 at a space, and dicing is performed using the plurality of rotary blades 12. In the method of detecting an unbalance of the rotary shaft of the dicing apparatus 10, a vibration sensor 16 is fixed to part of the main body of the dicing apparatus 10, and an unbalance of the rotary shaft 14 is detected by means of the vibration sensor 16. COPYRIGHT: (C)2003,JPO |
