CASSETTE FOR STORING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To reduce the size and weight of a cassette for storing substrates by reducing the storage pitch of substrate.

SOLUTION: The cassette 1 for storing substrates comprises a substrate receiver 5 provided with an upward protrusion 53 for supporting a substrate 100 at a central position wherein the substrate 100 is placed or removed using a carrying means 200, e.g. a robot. The substrate receiver 5 has a shape copying the flexure of the substrate 100 occurring when the carrying means 200 supports the substrate 100 from below.

COPYRIGHT: (C)2003,JPO