| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic multilayer substrate which has assured good yield and improved reliability. SOLUTION: In this method of manufacturing the ceramic multilayer substrate, a conductor pattern 1 is formed, with an intaglio printing method, on a ceramic substrate 2 and an insulated layer 21 is formed at least on the conductor pattern 1. Particularly, a process to remove residues at the surface of the intaglio after filling of conductive paste and a process for chemical wet etching of the baked conductor pattern and subsequent cleaning step are added to this method. COPYRIGHT: (C)2003,JPO |
