| 摘要 |
PROBLEM TO BE SOLVED: To provide a light-weight and small-sized image pickup device which can easily control the traveling direction of electromagnetic waves in a wavelength band from a millimeter wave band to the area of infrared rays, at a low cost. SOLUTION: The image pickup device is provided with a reflection mirror 11, a micro mirror array 12 for further reflecting an electromagnetic wave reflected by the reflection mirror 11, and an electromagnetic sensor 14 for sensing the electromagnetic wave of which the incidence direction is controlled by the micro mirror array 12. The micro mirror array 12 has a structure in which a plurality of micro mirrors and an electronic circuit for controlling the angles of the micro mirrors are integrated on a semiconductor substrate. Each micro mirror has maximum dimensions longer than the wavelength of the electromagnetic wave and a length≤30 times as long as the wavelength of the electromagnetic wave. The micro mirror array 12 is arranged in the vicinity of the focus of the reflection mirror 11, and the electromagnetic wave made incident on the image pickup device is reflected by the reflection mirror 11 and is converged on the micro mirror array 12. COPYRIGHT: (C)2003,JPO
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