发明名称 CELL STRUCTURE OF SRAM AND INSPECTION METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To enable the fine inspection of elements constituting one bit in an SRAM. <P>SOLUTION: In a memory cell, two inverters INV1 and INV2 are constituted of four transistors 1, 2, 3 and 4, and two transistors 5, 6 are made to be selective transistors. Wirings 31-34 of other systems are arranged on each of high voltage side and low voltage side terminals (for Vdd1, for GND1) of the first inverter INV1 and on each of high voltage side and low voltage side terminals (for Vdd2, for GND2) of the second inverter INV2, in the respective memory calls. Wirings 40, 41, 42 and 43 for inspecting the transistors are arranged which are connected with drains of the selective transistors 5, 6, respectively. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003197778(A) 申请公布日期 2003.07.11
申请号 JP20010397349 申请日期 2001.12.27
申请人 DENSO CORP 发明人 SONE HIROKI;KUZUHARA TAKESHI
分类号 G01R31/28;G11C11/41;G11C11/413;G11C29/00;G11C29/12;H01L21/8244;H01L27/11 主分类号 G01R31/28
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