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发明名称
摘要
申请公布号
NL7014102(A)
申请公布日期
1971.03.29
申请号
NL19700014102
申请日期
1970.09.24
申请人
发明人
分类号
G03F7/20;H01J9/233;H01J29/45;H01L21/027;H01L27/00;H01L27/144;(IPC1-7):H01J29/45;H01L7/64;H01L15/00
主分类号
G03F7/20
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代理人
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