| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable a movable body to move to a breach track in a work area from one side or the other side of a main track, and also enable the movable body to move on the main track without changing a track so that the work area is skipped. <P>SOLUTION: The transfer system comprises a main track 21, branch tracks 23 branched from the main track 21 and connected to respective modules 13A-13H, a transport vehicle 25 which is movable engaged with and moves on the main track 21 and the branch tracks 23 for transferring semiconductor wafers, and a bidirectional branching means 60 whose one end is connected to one side of the main track 21 and whose other end is connected to the other side of the main track 21. The branching means 60 has a first branch track 33A branched from one side of the main track 21 to the branch track 23 in the modules 13A-13H, and has a second branch track 33B branched from the other side of the main track 21 to the branch track 23 in the modules 13A-13H. <P>COPYRIGHT: (C)2003,JPO</p> |
