| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for surface acoustic wave element and a surface acoustic wave element using it which achieves an excellent quality and uniform characteristic with high yield. SOLUTION: A substrate for surface acoustic wave element comprises a lithium tantalate single crystal, a lithium niobate single crystal, or a signal crystal having a langasite type crystal structure. And a density of linear defects that the width is 0.2 to 2μm, and the length is≥0.2μm formed by etching with acid is≤5/cm<SP>2</SP>. A surface acoustic wave element is constituted by forming an excitation electrode that generates a surface acoustic wave on the substrate for the surface acoustic wave element. COPYRIGHT: (C)2003,JPO
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