| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a guiding apparatus, in which when information from an external input means is not imparted for a predetermined time, energization of the motor is interrupted to prevent characteristics due to heating of the motor from deteriorating and which can be used for a long period in the apparatus, in which the motor is driven based on the information from the input means to allow a stage to be moved. <P>SOLUTION: The guiding apparatus, having the ultrasonic motor as the drive source of the movable member, comprises a controller 37 as a servo controller thereof for allowing a stage to be moved by driving the motor, based on a signal from the external input means and having a function of re-outputting a drive signal to the motor at the stage of imparting a new command position signal by the input means by stopping the output of the drive signal to the motor, when the command position signal is not imparted from the input means for a predetermined time during its operation. <P>COPYRIGHT: (C)2003,JPO |
