| 摘要 |
PROBLEM TO BE SOLVED: To avoid impartation of warpage to a substrate without formation of air bubbles by lowering pressurizing force and taking a large margin of the pressurizing force in aligning cover sheets 22 which are light transparent layers of, for example 0.1 mm by a roll nip type panel aligner. SOLUTION: A sheet-like elastic body 2 of extra low hardness having a thickness of about 1 mm is wound around a cylindrical arbor 1 and the end of the elastic body 2 is tightly housed into a groove 3 formed to a U shape at a prescribed depth on the outer periphery thereof, is sandwiched by a retaining plate 4 for fixing and is fixed by a screw 5 for clamping not so as to loose. Such constituted elastic roll 10 is pressed in the state sandwiched with the cover sheet 22 to a disk medium 21 and the rotating state is so controlled that the retaining plate 4 does not come within the nip range of the cover sheet 22. Since the hardness of the elastic body 2 is low, the tight adhesion area W to the cover sheet 22 against the pressing pressure P of the elastic body roll 10 increases and the pressurizing force per unit area to the disk substrate 21 can be lowered. COPYRIGHT: (C)2003,JPO
|
