| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave device and its manufacturing method for reducing an insertion loss, superior in weather resistance, and for reducing the cost. <P>SOLUTION: An interdigital electrode 1b is provided on a piezoelectric substrate 1a. A function film 4 composed of at least one type selected from a silicon nitride film, a silicon oxide film, and an oxynitride film is formed on at least one part of the interdigital electrode 1b by an ECR sputtering method. <P>COPYRIGHT: (C)2003,JPO |
