| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a moving apparatus and a moving method for a working head that can secure positioning accuracy. <P>SOLUTION: The moving apparatus of a working head connects a slide guide moving in a Y direction within a horizontal surface along two parallel direct-acting sections, and moves the working head by a connecting section 8 that is driven by a direct-acting drive mechanism comprising a motor 10 and a feed screw 11. Positions YR and YL in the Y direction of two slide guides are detected by linear scales 17A and 17B, and a misalignment error Δy in the Y direction of the working head is obtained based on an arrangement pitch P of the linear scales 17A and 17B and positions X, YR, and YL of the working head for position correction, thus securing position accuracy in the working head even if the direct-acting mechanism is not arranged at the center- of-gravity position of the connecting section 8. <P>COPYRIGHT: (C)2003,JPO |
