| 摘要 |
PROBLEM TO BE SOLVED: To improve sensitivity in a light receiving part and to suppress the occurrence of color mixture in a solid-sate image pickup element having a micro lens and a light receiving part having a photoelectric conversion function. SOLUTION: An opening 27 is disposed in interlayer insulating films 18A to 18D between a photodiode 13 as the light receiving part and the micro lens. A reflection film 28 constituted of aluminum (Al), for example, is formed on the surface of a protection film 24 being the sidewall part of the opening part 27. Incident light passes through the micro lens 32, a flattened insulating film 29 and a protection film 24 inside the opening part 27 and the interlayer insulating film 18A, and it is focused in a position which is set by the flattened insulating film 29 and the like near the photodiode 13, inside the opening part 27 or near the opening part 27. Then, the photodiode 13 performs photoelectric conversion. Even if the light from the micro lens 32 focuses near the opening part 27, the light securely reaches the photodiode 13 while it is reflected on the reflection film 28. COPYRIGHT: (C)2003,JPO
|
