| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device capable of automatically measuring the pitch between rotary blades and promptly feedbacking the measured result. SOLUTION: The pitch between the rotary blades 12 is measured in this multi-blade dicing device 10 wherein a plurality of rotary blades 12 are fixed on the same shaft with a distance between them. A sensor 16 is arranged near the edges of the blades 12, a sensor stage 18 whereon the sensor 16 is fixed is allowed to move in parallel with the shaft, and then the sensor 16 is moved and determines the positions of the blades 12 along with the shaft direction for the measurement of the pitch between the blades 12. COPYRIGHT: (C)2003,JPO |
