| 摘要 |
PROBLEM TO BE SOLVED: To minimize fluctuations in temperatures of an object in the case of controlling a temperature of the object to a desired value using a heating medium fluid. SOLUTION: A controller (9) controls power of a thermoelectric conversion device (6) for cooling/heating the heating medium fluid supplied to the object (5). The controller (9) uses a temperature (T1) of the heating medium fluid flowing from the thermoelectric conversion device (6) and a temperature (Ts) of the object to perform a feedback control operation. In the feedback control operation, the difference between the temperature (Ts) of the object and the temperature (T1) of the heating medium is added to the set temperature (SV) to calculate the target temperature for the temperature (T1) of the heating medium. The operation amount for a cooler/heater (6) is then calculated using an I-PD operation with respect to the deviation between the target temperature and the temperature (T1) of the heating medium. Before starting the feedback control operation, the initial value for the operation amount is calculated corresponding to the amount of a heat load expected to be applied to the object (5) from the outside during the control and the set temperature (SV). The feedback control operation is started after the output of the initial value. COPYRIGHT: (C)2003,JPO
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