| 摘要 |
PROBLEM TO BE SOLVED: To minimize fluctuations in temperatures of an object in the case of controlling the temperature of the object to a desired value using a heating medium fluid. SOLUTION: A controller (9) controls power of a thermoelectric conversion device (6) for cooling/heating the heating medium fluid supplied to the object (5). The controller (9) uses a temperature (T1) of the heating medium fluid flowing from the thermoelectric conversion device (6) and a temperature (Ts) of the object to perform a feedback control operation. In the feedback control operation, before a heat load is applied to the object (5) from the outside, follow up control is performed based on only the temperature (T1) of the heating medium fluid to indirectly set the temperature (Ts) of the object as as set temperature (SV). After the heat load is applied to the object (5) from the outside, a current target temperature is actively set according to the temperature difference between the current temperature (T1) of the heat medium fluid and the temperature (Ts) of the object, and the follow up control is performed to control the temperature (T1) of the heat medium fluid to the current target temperature. COPYRIGHT: (C)2003,JPO
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