发明名称 OPTICAL HEATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an optical heating apparatus capable of compensating for a deteriorated capacitor by controlling a charging voltage, or notifying abnormality in a discharge circuit, on the basis of a discharge current measured using a current detection sensor provided in the discharge circuit in a non-contact state therewith. SOLUTION: The optical heating apparatus having a plurality of flashing discharge lamps 1 disposed approximately in parallel on a same plane for heating a workpiece by a flashing light of each of the plurality of flashing discharge lamps comprises: a plurality of discharge circuits 19, each of which includes each flashing discharge lamp 1 and a capacitor 17 connected in series therewith for supplying electric charges to the flashing discharge lamp during flashing; a current detection sensor 21 provided in each discharge circuit 19 for sensing a discharge current i of the discharge circuit 19 without contacting therewith; and a power supply control circuit 25 for controlling a quantity of light from the flashing discharge lamp 1 at a predetermined value by controlling a charging voltage of the capacitor 17 in the discharge circuit 19 in accordance with a detected value detected by a respective current detection sensor 19; or a display circuit 26 for notifying abnormality in the discharge circuit 19. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003197556(A) 申请公布日期 2003.07.11
申请号 JP20010398961 申请日期 2001.12.28
申请人 USHIO INC 发明人 HANEDA HIROSHIGE
分类号 H05B7/00;H01L21/00;H01L21/26;H05B41/32;(IPC1-7):H01L21/26 主分类号 H05B7/00
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