发明名称 METHOD FOR ADHERING TRANSPARENT ARTICLES AND QUARTZ GLASS PLATE PREPARED THROUGH ADHESION AND DEVICE USING THE SAME
摘要 A method for adhering two pieces of a substance transparent to a short wave length ultraviolet light, such as two plates of quartz glass, which comprises using an alkoxide as a material for adhesion and irradiating a portion to be adhered with an ultraviolt light. The method can be practiced at room temperature with ease and allows the transmission of a light having a short wave length to the limit inherent in the substance used, such as quartz, and thus can be used for producing a quartz glass plate having a large area through adhering plural quartz glass plates in a transverse direction. The quartz glass plate having a large area can be utilized, in a light cleaning device, as a window partitioning a light source section and a cleaning chamber.
申请公布号 WO03055820(A1) 申请公布日期 2003.07.10
申请号 WO2002JP13813 申请日期 2002.12.27
申请人 ONUKI, HIDEO 发明人 ONUKI, HIDEO
分类号 G02B1/04;B08B7/00;C03C27/10;G02B1/10;H01L21/304;(IPC1-7):C03C27/10 主分类号 G02B1/04
代理机构 代理人
主权项
地址