发明名称 Nitride ready only memory cell with two top oxide layers and the method for manufacturing the same
摘要 A nitride ready only memory cell with two top oxide layers and the method for manufacturing the same are disclosed. By high temperature oxidation (HTO), a more oxide layer is deposited on the floating gate of the ONO structure (Oxide-Nitride-Oxide structure) as a protecting layer so as to prevent the charges trapped in the silicon nitride layer of the ONO floating gate from being discharged between a polysilicon layer and a nitride layer so as to increase the reliability of the memory.
申请公布号 US2003129794(A1) 申请公布日期 2003.07.10
申请号 US20020206097 申请日期 2002.07.29
申请人 LIU CHEN-CHIN 发明人 LIU CHEN-CHIN
分类号 H01L21/8246;(IPC1-7):H01L21/823 主分类号 H01L21/8246
代理机构 代理人
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