PORTABLE APPARATUS AND METHOD FOR TREATING A WORKPIECE

摘要

A plasma generating apparatus and method for treating a surface of a workpiece. This apparatus comprises a power supply (100), at least one powerable electrode connected to the power supply (100), at least one groundable electrode connected to ground, a dielectric separating the at least one powerable electrode and the at least one groundable electrode, a chamber at least partially housing both the powerable electrode and the groundable electrode and a first inlet for admitting a first gas into the chamber such that the first gas can flow between the at least one powerable electrode and the at least one groundable electrode. The at least one powerable electrode and the at least one groundable electrode are disposed in an array. These electrodes are arranged to be on a common side of a workpiece, to provide a portable apparatus.