| 摘要 |
A method for fabricating a sensor for chemical and/or biological materials, comprisingsteps of providing a wafer comprising a plurality of cantilever assemblies, each of theassemblies comprising a cantilever member and a micro-channel plate bonded to thecantilever member, the micro-channel plate further comprising a micro-channel, functionalizing each of the cantilevers by directing a flow of a plurality of functionalizingmaterials through the micro-channels, and dicing the wafer into a plurality of the sensors.Each of the cantilever assemblies comprises substrate comprising control and senseelectrodes deposited on its top side and scribe marks etched on its back side; a cantilevermember comprising a cantilever, a seed layer and a contact pad formed on top side of thecantilever member; and the micro-channel plate comprises a micro-channel housing defining the micro-channel etched through the housing, wherein the back side of the cantilevermember is bonded to the substrate and the micro-channel plate is bonded to said top side ofthe cantilever member. Control electronics are incorporated into the substrate for a completely integrated design. |
