发明名称 Electrolyte cell for capacitance-voltage measurement of a semiconductor sample.
摘要 The electrolyte cell comprises an electrolyte space (1), in which light (L) can radiate vertically from above through a light window (3). A light outlet (5) is arranged at the bottom part of the electrolyte space and is provided with a sealing ring (7). A device (9) is provided for pressing on the semiconductor sample against the sealing ring, from the bottom. The semiconductor sample is horizontally positioned. The electrolyte cell further comprises two inlet pipes (13,17) for electrolyte or cleaning liquid (F). An outlet pipe (19) is provided for the electrolyte or cleaning liquid, having its entry opening above the underside of the light window.
申请公布号 DE10163672(A1) 申请公布日期 2003.07.10
申请号 DE2001163672 申请日期 2001.12.21
申请人 WOLFF, THOMAS 发明人 WOLFF, THOMAS
分类号 G01N27/02;G01N27/22;(IPC1-7):G01N27/22;G01N27/403 主分类号 G01N27/02
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