发明名称 PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD FOR MAKING SUCH A PROBE
摘要 The invention relates to a probe for a magnetic force microscope,comprising a movable cantilever placed in the plane of a wafer and a tip placed substantially at right angles to the cantilever,wherein the cantilever is able to move and its oscillation direction is in the wafer plane,and the tip lies virtually in or parallel to this wafer plane.
申请公布号 WO03056351(A1) 申请公布日期 2003.07.10
申请号 WO2002NL00842 申请日期 2002.12.18
申请人 STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN;VAN DEN BOS, ARNOUT, GERBRAND;ABELMANN, LEON;LODDER, JACOBUS, CHRISTIAAN 发明人 VAN DEN BOS, ARNOUT, GERBRAND;ABELMANN, LEON;LODDER, JACOBUS, CHRISTIAAN
分类号 G01Q60/50;G01Q60/54;G01Q60/56;G01R33/038;(IPC1-7):G01R33/038;G12B21/10 主分类号 G01Q60/50
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