| 发明名称 |
System and methods for analyzing copper chemistry |
| 摘要 |
The present invention relates to methods for removing the matrix effects caused by variance in copper concentration and acidity during measurement of the organic additive concentration in a sample copper plating solution. |
| 申请公布号 |
US2003127341(A1) |
申请公布日期 |
2003.07.10 |
| 申请号 |
US20020323310 |
申请日期 |
2002.12.19 |
| 申请人 |
KING MACKENZIE E.;BHELLA RICHARD;SCHOMBURG CORY;ROBERTSON PETER |
发明人 |
KING MACKENZIE E.;BHELLA RICHARD;SCHOMBURG CORY;ROBERTSON PETER |
| 分类号 |
G01N21/35;G01N27/416;G01N27/42;(IPC1-7):G01N27/26 |
主分类号 |
G01N21/35 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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