发明名称 |
Mikromechanisches Bauelement und Verfahren zur Herstellung desselben |
摘要 |
A micro mechanical component, in particular an accelerometer, of the present invention comprises a diamond base, and a diamond cantilever supported on the base and relatively driving to the base. A process for producing a micromechanical component involves forming of a dummy layer promoting the growth of diamond, depositing a diamond layer by vapor phase synthesis (CVD), and removing said dummy layer. <IMAGE> |
申请公布号 |
DE69530954(D1) |
申请公布日期 |
2003.07.10 |
申请号 |
DE1995630954 |
申请日期 |
1995.03.21 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SHIOMI, HIROMU;NISHIBAYAHI. YOSHIKI,;SHIKATA, SHIN-ICHI |
分类号 |
B81B3/00;B81C1/00;G01C19/56;G01H3/08;G01H11/00;G01H11/06;G01L9/00;G01P15/08;G01P15/125;G01Q70/14 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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