| 摘要 |
An object of this invention is to provide an alignment method which can execute accurate alignment using only one kind of alignment detection apparatus. In order to achieve this object, an alignment method of aligning an object to be aligned by measuring an alignment mark position on the object includes detecting the alignment mark on the object, obtaining the position data of the alignment mark on the basis of the detected mark information, extracting the feature amount of the alignment mark on the basis of the mark information, obtaining the correction value of the position data on the basis of the extracted feature amount of the alignment mark, and aligning the object on the basis of position information corrected using the correction value.
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