| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of scanning more stably at a higher speed even in the case of a lever scan type. SOLUTION: This scanning probe microscope 100 has a scanning mechanism 120 for scanning a cantilever 110. The scanning mechanism 120 has a z-scanning driving part 130, an x-scanning driving part 150 and a y-scanning driving part 170. The z-scanning driving part 130 has a pair of z-scanning actuators 132, 134 displaceable along one axis. The actuators are supported by a first support member 136 and arranged plane-symmetrically across the first support member 136. The z-scanning driving part 130 also has a cantilever holder 142 fixed on the free end of the z-scanning actuator 132 on the lower side. The z-scanning driving part 130 also has a deadweight 144 fixed on the free end of the z- scanning actuator 134 on the upper side. COPYRIGHT: (C)2003,JPO
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