发明名称 SLURRY LIQUID CONTAINING POLYCRYSTALLINE DIAMOND FINE POWDER
摘要 <p><P>PROBLEM TO BE SOLVED: To prepare a slurry liquid which can give the fine central line-average roughness of a magnetic hard disk substrate and can carry out a texturing without causing problems such as head hit. <P>SOLUTION: A method for texturing the surface of the magnetic hard disk substrate comprises a process for rotating a magnetic hard disk substrate, a process for pressing a polishing tape on the surface of the magnetic polishing abrasive particles, and shaking the magnetic tape in the radial direction of the magnetic hard disk substrate, and a process for dropping the slurry liquid on the surface of the magnetic hard disk. The slurry liquid contains polycrystalline diamond fine powder and a surfactant. The magnetic polishing abrasive particles have an average particle diameter d50 of 0.05 to 5μm and are contained in an amount of 0.01 to 3 wt.% based on the slurry liquid. The surfactant is contained in an amount of 0.5 to 30 wt.% based on the slurry liquid. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003193041(A) 申请公布日期 2003.07.09
申请号 JP20020324713 申请日期 2002.11.08
申请人 NIHON MICRO COATING CO LTD 发明人 HORIE YUJI;WATANABE ATSUSHI
分类号 B24B37/00;C09K3/14;H01L21/304;(IPC1-7):C09K3/14 主分类号 B24B37/00
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