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发明名称
Complementary mis device
摘要
申请公布号
AU2002354136(A1)
申请公布日期
2003.07.09
申请号
AU20020354136
申请日期
2002.12.10
申请人
TADAHIRO OHMI;TOKYO ELECTRON LIMITED
发明人
KOJI KOTANI;SHIGETOSHI SUGAWA;TADAHIRO OHMI
分类号
H01L21/8238;H01L27/092;H01L29/04;H01L29/786;(IPC1-7):H01L27/092
主分类号
H01L21/8238
代理机构
代理人
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