INTEGRATING METAL WITH ULTRA LOW-K DIELECTRICS,申请号EP20010973154-传众专利搜索

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发明名称	INTEGRATING METAL WITH ULTRA LOW-K DIELECTRICS
摘要
申请公布号	EP1325516(A2)	申请公布日期	2003.07.09
申请号	EP20010973154	申请日期	2001.09.18
申请人	ACM RESEARCH, INC.	发明人	WANG, HUI
分类号	C25F3/02;H01L21/288;H01L21/304;H01L21/3063;H01L21/3205;H01L21/321;H01L21/76;H01L21/768;H01L23/522;(IPC1-7):H01L21/44;H01L21/31;H01L21/469	主分类号	C25F3/02
代理机构		代理人
主权项
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