| 摘要 |
PROBLEM TO BE SOLVED: To properly execute an electric test of a subject. SOLUTION: This probe device 3 is mounted in a state of being opposite to the subject on a chuck table at its one face 3a. This device comprises a temperature measuring device 11 for measuring a temperature of the face 3a of the probe device 3 and that of another face 3b directed to an opposite side with respect to the face 3a, a temperature adjusting device 12 for adjusting the temperature of the face 3a or the other face 3b of the probe device 3, or both faces, and a control device 13 for controlling the operation of each part forming the prober 1 on the basis of a result of the measurement of the temperature of the faces 3a and 3b by the temperature measuring device 11. The control device 13 controls the operation of the temperature adjusting device 12 to keep a temperature difference between the faces 3a and 3b within a tolerance level, keeps each part forming the prober 1 in a standby state, when the temperature difference is outside of the tolerance level, and operates each part to start a test of the subject, when the temperature difference is within the tolerance level. COPYRIGHT: (C)2003,JPO
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