| 摘要 |
PROBLEM TO BE SOLVED: To provide an easy to assemble contact probe structure without positioning problems caused by a difference in coefficient of thermal expansion between the structure and the subject of measurement, and its method of manufacture. SOLUTION: The contact probe structure 91 includes a plurality of contact probes each having a tip 1 for contacting the subject of measurement and each having a root 3 for taking out an electrode, and first and second retaining members 21 and 22 having a plurality of parallel grooves. The first and second retaining members 21 and 22 are fixed to each other across the roots 3 of the plurality of contact probes in the plurality of grooves in such a manner that the tips 1 of the plurality of contact probes are arranged in a line while protruding. COPYRIGHT: (C)2003,JPO
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