| 摘要 |
PROBLEM TO BE SOLVED: To prevent a sticking of an element, which performs optical modulation by putting a movable part for optical modulation away from and close to a fixed part for optical modulation, to prevent a defective from being produced, and to prevent the man-hour for film formation from increasing. SOLUTION: A projection member 11 projecting from the surface of a substrate 10 is formed, a film is formed over it to form the fixed part 13 for optical modulation, a sacrifice layer 14, and the movable part 15 for optical modulation in order, and on the fixed part 13 for optical modulation, a spacer 21 conforming with the shape of the projection member 11 is formed. A hinge which supports the movable part 15 is so shaped that as the movable part 15 for optical modulation moves toward the fixed part 13 for optical modulation, the movable part 15 is guided to shift in position in a plane parallel to the surface of the substrate 10. Consequently, the spacer 21 is made not to enter a recessed part 22 of the movable part 15 by the projection member 11 and the movable part 15 is avoided coming into contact with the fixed part 13 by the spacer 21. COPYRIGHT: (C)2003,JPO
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