Method for forming pattern of stacked film,申请号GB20030012668-传众专利搜索

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发明名称	Method for forming pattern of stacked film
摘要
申请公布号	GB0312668(D0)	申请公布日期	2003.07.09
申请号	GB20030012668	申请日期	2003.06.02
申请人	NEC CORPORATION	发明人
分类号	H01L21/311;H01L21/3213;H01L21/336	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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