| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a groove part which enables a wall surface to be formed upright and to provide a method for an optical wavegudie element to which this forming method is applied. SOLUTION: A sacrificial coating layer 24 is formed on an over-clad layer 23 of a composite which has a core layer 21 coated with the over-clad layer 23 thereon and an under-clad layer 22 thereunder, and the sacrificial coating layer 24 is subjected to dry etching, and gas 13 containing large quantities of moving components in the horizontal direction out of etching gas caused by dry etching is attenuated by collision against a wall surface 31 of a groove formed in the sacrificial coating layer 24, and a groove part 29 is formed by gas 32 having moving components in the vertical direction out of etching gas as the main components. COPYRIGHT: (C)2003,JPO |
