METHOD FOR FLATTENING CERAMIC SUBSTRATE BY USING POROUS MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for flattening a ceramic substrate by using a porous material. SOLUTION: In the method for flattening a ceramic substrate by using a porous material matching the requirement for the adhesion strength of a film layer in the succeeding process, a buffer layer (2) and a porous nanometer structural layer (10) are formed on the substrate (30). COPYRIGHT: (C)2003,JPO