OPTICAL SWITCH AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To enable easy good-yield manufacture. SOLUTION: A light guide substrate 2 has a groove 24 for mirror reception and a light guide. The light guide guides light inputted to an input port to an output port selected by putting a mirror 31 in or out of the groove 24. An actuator substrate 4 has the mirror 31 and an actuator which makes the mirror 31 retract toward and project from the substrate 4. The light guide substrate 2 and actuator substrate 4 are so positioned by using alignment marks so that the mirror 31 exits from the groove 24 when retracting toward the substrate 4 and enters the groove 24 when projecting from the substrate 4, and joined together across a spacer 3. The positioning is carried out while all mirrors 31 are made to retract toward the substrate 4. COPYRIGHT: (C)2003,JPO