| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inspecting apparatus for a surface defect that can observe the defects such as dust and the unevenness of film thickness on the surface of an object to be inspected as a simple image, and therefore easily construct an automatic inspection apparatus for the defect by combining with an image processing device. SOLUTION: The inspecting apparatus comprises a collimator lens 12 light sources 2-5 of a narrow band, a half-mirror 11, and an image forming lens 13. The collimator 11 is arranged just at the front of an object to be inspected having a thin film on its surface with almost the same size as the observation visual field of the object 21, and passes the specular reflection light from the surface of the object 21 with applying the light from a light source 1 as parallel luminous flux. The light sources 2-5 of a narrowband are arranged near the focus of the collimator lens 12 with a plurality of center wavelengths arbitrarily selectable, and enters the light into the collimator lens 12. The half-mirror 11 vertically applys the light from these light sources 2-5 to the object 21 by passing it through the collimator lens 12 with reflection and transmission. The image forming lens 13 passes the specular reflection light from the surface of the object 21 through the collimator lens 12 and transmits or reflects it by the half-mirror 11, and observes the surface of the object 21 with an entrance pupil at a position conjugate with the light sources 2-5. COPYRIGHT: (C)2003,JPO
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