VERY-SMALL-AIR-BUBBLE ANALYZER FOR HIGH-PURITY GLASS TUBE USING LASER BEAM SCATTERING

摘要

PROBLEM TO BE SOLVED: To disclose a very-small-air-bubble analyzer for a high-purity glass tube by using a laser beam scattering operation. SOLUTION: The analyzer is constituted of an optical table comprising a sample stage; the glass tube which is perpendicularly mounted in the vertical direction on the optical table, and which is turned and moved up and down at a definite speed by the sample stage; a laser which is arranged so as to be separated on one side of the glass tube, and by which its outer circumferential face is irradiated with a laser beam at a prescribed angle; and a detector which is arranged on the other side of the glass tube, and by which very small air bubbles in the glass tube and a distribution content of the very small air bubbles are detected three-dimensionally by using scattered light in a laser pass line on the glass tube generated by the laser beam irradiated at the glass tube. COPYRIGHT: (C)2003,JPO