| 摘要 |
PROBLEM TO BE SOLVED: To provide a new structure of a light source device for an excimer lamp and a method for manufacturing it in order to keep up with the enlargement of the area of an object to be treated in the light source device for the excimer lamp where a lamp chamber and a treatment chamber are partitioned with an ultraviolet-ray permeable member. SOLUTION: The method for manufacturing the light source device for the excimer lamp which consists of an excimer lamp (20) that radiates an ultraviolet ray and a casing (11) that surrounds the excimer lamp (20) and has an ultraviolet-ray permeable window member in a part of the casing (11) is characterized in that the ultraviolet-ray permeable window member is formed through the photojunction of ultraviolet-ray permeable plate members (S) by applying alkoxide (T) to junction parts of them, incorporating them into an opening (24) of the casing (11) and then irradiating the alkoxide (T) with the light emitted from the excimer lamp (20). COPYRIGHT: (C)2003,JPO
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