FLUID DISCHARGE NOZZLE, APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE FLUID DISCHARGE NOZZLE

摘要

PROBLEM TO BE SOLVED: To provide a fluid discharge nozzle capable of widely and uniformly supplying fluid, and an apparatus and a method for treating a substrate using the fluid discharge nozzle. SOLUTION: The fluid discharge nozzle has a fluid supply port 12 provided in one end part of a nozzle body 11, a fluid discharge port 13 provided in another end part of the nozzle body 11 to be opposed to the fluid supply port 12, and a fluid flow passage 14 for connecting the fluid supply port 12 to the fluid discharge port 13 and having a narrow long shaped cross section vertical to the flow of the fluid. In the nozzle in which the longitudinal length in the cross section of the fluid flow passage 14 is increased from the fluid supply port 12 side toward the fluid discharge port 13 side and the breadth directional length is decreased from the fluid supply port 12 toward the fluid discharge port 13, and the cross section of the fluid flow passage in the longitudinal direction has a curved surface to extend the fluid flow passage 14 from the fluid supply port 12 side toward the fluid discharge port 13 side. COPYRIGHT: (C)2003,JPO