发明名称 |
Pressure transducer with compensation for thermal transients |
摘要 |
A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.
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申请公布号 |
US6588280(B1) |
申请公布日期 |
2003.07.08 |
申请号 |
US20020127630 |
申请日期 |
2002.04.22 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
QUIGLEY CLAUDIA J.;MATHEW SANTHI E.;MINDLIN LEONID;POULIN JAMES M. |
分类号 |
G01L9/00;G01L19/00;G01L19/04;(IPC1-7):G01L7/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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