| 摘要 |
An ultrasonic inspection device is constructed of an ultrasonic scanning unit, drive unit for the ultrasonic scanning unit, and a computing unit. The ultrasonic scanning unit is provided with an ultrasonic probe for two-dimensionally scanning a surface of a specimen with an ultrasonic wave through a medium such as water for the ultrasonic wave. The computing unit controls the ultrasonic scanning unit via the drive unit and performs an inspection for any flaw in a film formed on a surface of abase material as the specimen. From the ultrasonic probe to the specimen, an angled incident wave is transmitted such that a leaked elastic surface wave is induced, and a leaked wave from the specimen is received at the ultrasonic probe. When the adhesion is good, the reception level of the leaked wave becomes low. When the adhesion is poor, on the other hand, the reception level of the leaked wave becomes high. The computing unit evaluates the degree of adhesion of a spray deposit to the base material from the reception level of the leaked wave.
|
