| 摘要 |
A variable optical attenuator, or VOA, includes a movable focusing mirror and an actuator integrated on a substrate or within a MEMS. The actuator moves the mirror within a range of motion to reflect, focus and steer a light beam. One embodiment further includes an input and an output photonic component, such as wave guides or optical fibers. The wave guides or optical fibers may have angled endfaces and be positioned to reduce the required operating range of motion of the mirror. The mirror may be a Fresnel mirror, a concave mirror, a diffractive mirror or a concave diffractive mirror. In certain embodiments the mirror is moved in at least two dimensions to steer the light beam to form a trajectory having at least two dimensions.
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