发明名称 Structures and methods for improved capacitor cells in integrated circuits
摘要 Systems, devices, structures, and methods are described that inhibit atomic migration that creates an open contact between a metallization layer and a conductive layer of a semiconductor structure. A layer of an inhibiting substance may be used to inhibit a net flow of atoms so as to maintain conductivity between the metallization layer and the conductive layer of the semiconductor structure. Such layer of inhibiting substance acts even with the presence of point defects for a given temperature.
申请公布号 US6590246(B1) 申请公布日期 2003.07.08
申请号 US20000499726 申请日期 2000.02.08
申请人 MICRON TECHNOLOGY, INC. 发明人 AGARWAL VISHNU K.
分类号 H01L21/02;H01L21/768;H01L21/8242;H01L29/92;(IPC1-7):H01L29/72 主分类号 H01L21/02
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