| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for performing multiple operations of cleaning and vacuum drying in enclosed vessels in order to achieve the purposes of drastic reduction of the manufacturing cost, protection of the environment, and energy saving. SOLUTION: An upper vessel 11 for storing a normal cleaning liquid, or the like, a cleaning vessel 21, and a lower vessel 31 for storing the used cleaning liquid, or the like, are arranged on the three levels of an upper level 10, a middle level 20 and a lower level 30 having height differences, respectively, and connected to one another by piping. The height of the vessel 21 can be adjusted by an elevating mechanism 22. A heating unit is arranged in the cleaning vessel. A recovery tank is connected to the cleaning vessel while a condenser for condensing the cleaning liquid vaporized by the heating unit is interposed between them. The cleaning vessel after the cleaning work is decompressed by the height difference between the vessel 21 and the vessel 31. The object to be treated is dried by vaporizing the cleaning liquid in the vessel 21 by heating, if necessary. The vaporized cleaning liquid is recovered by the condenser. COPYRIGHT: (C)2003,JPO
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