| 发明名称 |
DEVICE FOR GENERATING POWERFUL MICROWAVE PLASMAS |
| 摘要 |
In a device for the production of powerful micro- wave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.
|
| 申请公布号 |
CA2248250(C) |
申请公布日期 |
2003.07.08 |
| 申请号 |
CA19972248250 |
申请日期 |
1997.03.03 |
| 申请人 |
SPITZL, RALF |
发明人 |
SPITZL, RALF;ASCHERMANN, BENEDIKT |
| 分类号 |
H01J37/32;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01J37/32 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
